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David Felsenthal
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Marblehead, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing pallet with cooling
Patent number
9,147,588
Issue date
Sep 29, 2015
Tel Nexx, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-thin wafer handling system
Patent number
7,100,954
Issue date
Sep 5, 2006
NEXX Systems, Inc.
Martin P. Klein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing pallet and related substrate processing method...
Patent number
6,821,912
Issue date
Nov 23, 2004
NEXX Systems Packaging, LLC
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing pallet and related substrate processing method...
Patent number
6,682,288
Issue date
Jan 27, 2004
NEXX Systems Packaging, LLC
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing pallet and related substrate processing method...
Patent number
6,530,733
Issue date
Mar 11, 2003
NEXX Systems Packaging, LLC
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-layer sputter deposition apparatus
Patent number
6,328,858
Issue date
Dec 11, 2001
NEXX Systems Packaging, LLC
David Felsenthal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-line sputter deposition system
Patent number
6,217,272
Issue date
Apr 17, 2001
Applied Science and Technology, Inc.
David Felsenthal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING PALLET WITH COOLING
Publication number
20110024964
Publication date
Feb 3, 2011
Nexx Systems, Inc.
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing pallet with cooling
Publication number
20080220622
Publication date
Sep 11, 2008
Daniel Goodman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sputter deposition system and methods of use
Publication number
20070209932
Publication date
Sep 13, 2007
Veeco Instruments Inc.
Piero Sferlazzo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ultra-thin wafer handling system
Publication number
20050110291
Publication date
May 26, 2005
Nexx Systems Packaging, LLC
Martin P. Klein
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate processing pallet and related substrate processing method...
Publication number
20020034883
Publication date
Mar 21, 2002
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing pallet and related substrate processing method...
Publication number
20020033133
Publication date
Mar 21, 2002
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate processing pallet and related substrate processing method...
Publication number
20020034429
Publication date
Mar 21, 2002
Martin P. Klein
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...