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David Ferris
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Rockville, MD, US
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last 30 patents
Information
Patent Grant
Plasma apparatus, gas distribution assembly for a plasma apparatus...
Patent number
8,580,076
Issue date
Nov 12, 2013
Lam Research Corporation
Alan Frederick Becknell
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Apparatus and plasma ashing process for increasing photoresist remo...
Patent number
7,449,416
Issue date
Nov 11, 2008
Axcelis Technologies, Inc.
Alan F. Becknell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma process and apparatus
Patent number
6,897,615
Issue date
May 24, 2005
Axcelis Technologies, Inc.
Alan C. Janos
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and plasma ashing process for increasing photoresist remo...
Publication number
20060046470
Publication date
Mar 2, 2006
Alan F. Becknell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-piece baffle plate assembly for a plasma processing system
Publication number
20050241767
Publication date
Nov 3, 2005
David S. Ferris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA APPARATUS, GAS DISTRIBUTION ASSEMBLY FOR A PLASMA APPARATUS...
Publication number
20040238123
Publication date
Dec 2, 2004
Axcelis Technologies, Inc.
Alan Frederick Becknell
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Plasma process and apparatus
Publication number
20020135308
Publication date
Sep 26, 2002
Alan C. Janos
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR