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David G. Taub
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Stamford, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Adjustable retardance compensator for self-referencing interferomet...
Patent number
11,249,402
Issue date
Feb 15, 2022
ASML Holding N.V.
Ryan Richard Westover
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High stability collimator assembly, lithographic apparatus, and method
Patent number
11,204,559
Issue date
Dec 21, 2021
ASML Holdings N.V.
David Taub
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Athermalization of an alignment system
Patent number
10,866,531
Issue date
Dec 15, 2020
ASML Netherlands B.V.
Suzanne Johanna Antonetta Geertruda Cosijns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus, system, and method for precision positioning and alignme...
Patent number
6,760,167
Issue date
Jul 6, 2004
ASML Holding N.V.
Michael F. Meehan
G02 - OPTICS
Information
Patent Grant
Apparatus, system, and method for precision positioning and alignme...
Patent number
6,556,364
Issue date
Apr 29, 2003
Michael F. Meehan
G02 - OPTICS
Information
Patent Grant
Apparatus, system, and method for active compensation of aberration...
Patent number
6,411,426
Issue date
Jun 25, 2002
ASML, US, Inc.
Michael F. Meehan
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
ADJUSTABLE RETARDANCE COMPENSATOR FOR SELF-REFERENCING INTERFEROMET...
Publication number
20210333720
Publication date
Oct 28, 2021
ASML Holding N.V.
Ryan Richard Westover
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
High Stability Collimator Assembly, Lithographic Apparatus, and Method
Publication number
20210072654
Publication date
Mar 11, 2021
ASML Holding N.V.
David TAUB
G02 - OPTICS
Information
Patent Application
Athermalization of an Alignment System
Publication number
20190219927
Publication date
Jul 18, 2019
ASML NETHERLANDS B.V.
Suzanne Johanna Antonetta Geertruda COSIJNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus, system, and method for precision positioning and alignme...
Publication number
20030202260
Publication date
Oct 30, 2003
Michael F. Meehan
G02 - OPTICS
Information
Patent Application
Apparatus, system, and method for active compensation of aberration...
Publication number
20020089734
Publication date
Jul 11, 2002
Michael F. Meehan
G02 - OPTICS
Information
Patent Application
Apparatus, system, and method for precision positioning and alignme...
Publication number
20010033437
Publication date
Oct 25, 2001
Silicon Valley Group, Inc.
Michael F. Meehan
G02 - OPTICS