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David H. Mai
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Endpoint control of multiple substrate zones of varying thickness i...
Patent number
10,589,397
Issue date
Mar 17, 2020
Applied Materials, Inc.
Alain Duboust
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Temperature control of chemical mechanical polishing
Patent number
9,005,999
Issue date
Apr 14, 2015
Applied Materials, Inc.
Kun Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint control of multiple substrates of varying thickness on the...
Patent number
8,694,144
Issue date
Apr 8, 2014
Applied Materials, Inc.
Alain Duboust
B24 - GRINDING POLISHING
Information
Patent Grant
Method of chemical mechanical polishing with high throughput and lo...
Patent number
7,232,761
Issue date
Jun 19, 2007
Applied Materials, Inc.
Shijian Li
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for polishing metal and dielectric substrates
Patent number
6,960,521
Issue date
Nov 1, 2005
Applied Materials, Inc.
Yongsik Moon
B24 - GRINDING POLISHING
Information
Patent Grant
Methods and apparatus for polishing substrates comprising conductiv...
Patent number
6,790,768
Issue date
Sep 14, 2004
Applied Materials Inc.
Yongsik Moon
B24 - GRINDING POLISHING
Information
Patent Grant
Method of chemical mechanical polishing with high throughput and lo...
Patent number
6,780,773
Issue date
Aug 24, 2004
Applied Materials Inc.
Shijian Li
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATE ZONES OF VARYING THICKNESS I...
Publication number
20170151647
Publication date
Jun 1, 2017
Applied Materials, Inc.
Alain Duboust
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE...
Publication number
20140222188
Publication date
Aug 7, 2014
Applied Materials, Inc.
Alain Duboust
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTROL OF POLISHING OF MULTIPLE SUBSTRATES ON THE SAME PLATEN IN C...
Publication number
20140030956
Publication date
Jan 30, 2014
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
Control Of Overpolishing Of Multiple Substrates On the Same Platen...
Publication number
20140024293
Publication date
Jan 23, 2014
Jimin Zhang
B24 - GRINDING POLISHING
Information
Patent Application
TEMPERATURE CONTROL OF CHEMICAL MECHANICAL POLISHING
Publication number
20140004626
Publication date
Jan 2, 2014
Applied Materials, Inc.
KUN XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE...
Publication number
20120053717
Publication date
Mar 1, 2012
Alain Duboust
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TUNING OF POLISHING PROCESS IN MULTI-CARRIER HEAD PER PLATEN POLISH...
Publication number
20110300776
Publication date
Dec 8, 2011
Applied Materials, Inc.
David H. Mai
B24 - GRINDING POLISHING
Information
Patent Application
HIGH THROUGHPUT LOW TOPOGRAPHY COPPER CMP PROCESS
Publication number
20090057264
Publication date
Mar 5, 2009
APPLIED MATERIALS, INC.
DAVID H. MAI
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for polishing metal and dielectric substrates
Publication number
20050032381
Publication date
Feb 10, 2005
Yongsik Moon
B24 - GRINDING POLISHING
Information
Patent Application
Method of chemical mechanical polishing with high throughput and lo...
Publication number
20050026442
Publication date
Feb 3, 2005
Shijian Li
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for polishing metal and dielectric substrates
Publication number
20030029841
Publication date
Feb 13, 2003
APPLIED MATERIALS, INC.
Yongsik Moon
B24 - GRINDING POLISHING
Information
Patent Application
Method of chemical mechanical polishing with high throughput and lo...
Publication number
20030022497
Publication date
Jan 30, 2003
APPLIED MATERIALS, INC.
Shijian Li
B24 - GRINDING POLISHING