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David Harold WHYSONG
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Dublin, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for design of a metrology target
Patent number
10,296,692
Issue date
May 21, 2019
ASML Netherlands B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
Publication number
20150186582
Publication date
Jul 2, 2015
ASML NETHERLANDS B.V.
Guangqing CHEN
G06 - COMPUTING CALCULATING COUNTING