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David Heald
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Brookfield, CT, US
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last 30 patents
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Patent Grant
Lithography supports with defined burltop topography
Patent number
11,520,241
Issue date
Dec 6, 2022
ASML Holding N.V.
Matthew Lipson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus, lithographic apparatus, and device manufactur...
Patent number
9,285,687
Issue date
Mar 15, 2016
ASML Holding N.V.
Stanislav Y Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHY SUPPORTS WITH DEFINED BURLTOP TOPOGRAPHY
Publication number
20210173312
Publication date
Jun 10, 2021
ASML Holding N.V.
Matthew LIPSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inspection Apparatus, Lithographic Apparatus, and Device Manufactur...
Publication number
20130083306
Publication date
Apr 4, 2013
ASML Holding N.V.
Stanislav Y. Smirnov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY