David Hetzer

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Training a machine learning system to determine photoresist parameters
- Patent number 7,949,618
- Issue date May 24, 2011
- Tokyo Electron Limited
- Joerg Bischoff
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining photoresist parameters using optical metrology
- Patent number 7,728,976
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Joerg Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated process control using optical metrology and photoresist p...
- Patent number 7,567,353
- Issue date Jul 28, 2009
- Tokyo Electron Limited
- Joerg Bischoff
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Automated process control using optical metrology and photoresist p...
- Publication number 20080241975
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Joerg Bischoff
- G01 - MEASURING TESTING
Information Patent Application
Determining photoresist parameters using optical metrology
- Publication number 20080241974
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Joerg Bischoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Training a machine learning system to determine photoresist parameters
- Publication number 20080243730
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Joerg Bischoff
- G06 - COMPUTING CALCULATING COUNTING