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David I. C. Pearson
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Los Angeles, CA, US
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last 30 patents
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Patent Grant
High density plasma deposition and etching apparatus
Patent number
5,421,891
Issue date
Jun 6, 1995
Plasma & Materials Technologies, Inc.
Gregor A. Campbell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...