David J. Drage

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Sebastopol, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Temperature controlled chuck for elevated temperature etch processing
- Patent number 4,971,653
- Issue date Nov 20, 1990
- Matrix Integrated Systems
- Gary B. Powell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma Reactor with removable insert
- Patent number 4,793,975
- Issue date Dec 27, 1988
- Tegal Corporation
- David J. Drage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically coupled wafer lift pins
- Patent number 4,790,258
- Issue date Dec 13, 1988
- Tegal Corporation
- David J. Drage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-uniform gas inlet for dry etching apparatus
- Patent number 4,780,169
- Issue date Oct 25, 1988
- Tegal Corporation
- Mark M. Stark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual wavelength sensor which employs object as part of a corner ref...
- Patent number 4,697,089
- Issue date Sep 29, 1987
- Tegal Corporation
- David J. Drage
- G01 - MEASURING TESTING
Information Patent Grant
Plasma reactor having slotted manifold
- Patent number 4,590,042
- Issue date May 20, 1986
- Tegal Corporation
- David J. Drage
- H01 - BASIC ELECTRIC ELEMENTS