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David J. Mount
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Andover, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for rotation of a workpiece in supercritical f...
Patent number
7,108,001
Issue date
Sep 19, 2006
Keith Pope
B08 - CLEANING
Information
Patent Grant
Adding energy to a cleaning process fluid for removing photo resist...
Patent number
6,935,352
Issue date
Aug 30, 2005
S.C. Fluids, Inc.
David J. Mount
B08 - CLEANING
Information
Patent Grant
Enhanced etching/smoothing of dielectric surfaces
Patent number
6,624,081
Issue date
Sep 23, 2003
Epion Corporation
Jerald P. Dykstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Supercritical fluid delivery and recovery system for semiconductor...
Patent number
6,612,317
Issue date
Sep 2, 2003
S.C. Fluids, Inc.
Michael A. Costantini
B08 - CLEANING
Information
Patent Grant
Supercritical fluid cleaning process for precision surfaces
Patent number
6,602,349
Issue date
Aug 5, 2003
S.C. Fluids, Inc.
Mohan Chandra
B08 - CLEANING
Information
Patent Grant
Enhanced etching/smoothing of dielectric surfaces
Patent number
6,331,227
Issue date
Dec 18, 2001
Epion Corporation
Jerald P. Dykstra
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUPERCRITICAL FLUID DELIVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING
Publication number
20070012341
Publication date
Jan 18, 2007
Stephen B. Douglas
B08 - CLEANING
Information
Patent Application
Loadbearing platform with fluid support, isolation and rotation
Publication number
20060029310
Publication date
Feb 9, 2006
S.C. FLUIDS, INC.
Rick C. White
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
Method and apparatus for rotation of a workpiece in supercritical f...
Publication number
20040194817
Publication date
Oct 7, 2004
Keith Pope
B08 - CLEANING
Information
Patent Application
Adding energy to a cleaning process fluid for removing photo resist...
Publication number
20040139986
Publication date
Jul 22, 2004
David J. Mount
B08 - CLEANING
Information
Patent Application
Method for releasing and drying moveable elements of micro-electron...
Publication number
20040139987
Publication date
Jul 22, 2004
David J. Mount
B08 - CLEANING
Information
Patent Application
Supercritical fluid delivery system for semiconductor wafer processing
Publication number
20040025908
Publication date
Feb 12, 2004
Stephen Douglas
B08 - CLEANING
Information
Patent Application
Supercritical fluid cleaning process for precision surfaces
Publication number
20040003831
Publication date
Jan 8, 2004
David J. Mount
B08 - CLEANING
Information
Patent Application
Supercritical fluid processes with megasonics
Publication number
20030116176
Publication date
Jun 26, 2003
Laura B. Rothman
B08 - CLEANING
Information
Patent Application
Enhanced etching/smoothing of dielectric surfaces
Publication number
20020016079
Publication date
Feb 7, 2002
Jerald P. Dykstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Supercritical fluid cleaning process for precision surfaces
Publication number
20020014257
Publication date
Feb 7, 2002
Mohan Chandra
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Supercritical fluid delivery and recovery system for semiconductor...
Publication number
20010050096
Publication date
Dec 13, 2001
Michael A. Costantini
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL