David J. Pasek

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Midland, MI, US

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Patents Grantslast 30 patents

Information Patent Grant
Recovery of lower-boiling silanes in a CVD process
- Patent number 5,118,485
- Issue date Jun 2, 1992
- Hemlock Semiconductor Corporation
- Arvid N. Arvidson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...