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David J. Twiss
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Topsfield, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Directional gas injection for an ion source cathode assembly
Patent number
8,263,944
Issue date
Sep 11, 2012
Varian Semiconductor Equipment Associates, Inc.
John Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY
Publication number
20100155619
Publication date
Jun 24, 2010
Varian Semiconductor Equipment Associates Inc.
John Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS