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David Knick
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Sunnyvale, CA, US
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last 30 patents
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Patent Grant
Methods for in-situ chamber clean in plasma etching processing chamber
Patent number
10,115,572
Issue date
Oct 30, 2018
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHODS FOR IN-SITU CHAMBER CLEAN IN PLASMA ETCHING PROCESSING CHAMBER
Publication number
20170213709
Publication date
Jul 27, 2017
Applied Materials, Inc.
Banqiu WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
DC VOLTAGE CHARGING OF CATHODE FOR PLASMA STRIKING
Publication number
20110236806
Publication date
Sep 29, 2011
Applied Materials, Inc.
ALAN HIROSHI OUYE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHODS AND APPARATUS FOR IN-SITU CHAMBER DRY CLEAN DURING PHOTOMAS...
Publication number
20090325387
Publication date
Dec 31, 2009
APPLIED MATERIALS, INC.
Xiaoyi Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY