David L. Halbmaier

Person

Shorewood, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reticle pod
- Patent number 9,745,119
- Issue date Aug 29, 2017
- Entegris, Inc.
- Steven P. Kolbow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate container with fluid-sealing flow passageway
- Patent number 8,727,125
- Issue date May 20, 2014
- Entegris, Inc.
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod
- Patent number 8,613,359
- Issue date Dec 24, 2013
- Entegris, Inc.
- Steven Kolbow
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reticle pod
- Patent number 8,231,005
- Issue date Jul 31, 2012
- Entegris, Inc.
- Steven P. Kolbow
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reticle pod with isolation system
- Patent number 7,607,543
- Issue date Oct 27, 2009
- Entegris, Inc.
- Barry Gregerson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with pressure equalization
- Patent number 7,528,936
- Issue date May 5, 2009
- Entegris, Inc.
- Barry Gregerson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Environmental control in a reticle SMIF pod
- Patent number 7,400,383
- Issue date Jul 15, 2008
- Entegris, Inc.
- David L. Halbmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with fluid-sealing flow passageway
- Patent number 7,328,727
- Issue date Feb 12, 2008
- Entegris, Inc.
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container door with particulate collecting structure
- Patent number 7,325,698
- Issue date Feb 5, 2008
- Entegris, Inc.
- David L. Halbmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer container washing apparatus
- Patent number 7,216,655
- Issue date May 15, 2007
- Entegris, Inc.
- David L. Halbmaier
- B08 - CLEANING
Information Patent Grant
Wafer container washing apparatus
- Patent number 6,926,017
- Issue date Aug 9, 2005
- Entegris, Inc.
- David L. Halbmaier
- B08 - CLEANING
Information Patent Grant
Method of cleaning a wafer carrier
- Patent number 6,248,177
- Issue date Jun 19, 2001
- Fluoroware, Inc.
- David L. Halbmaier
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY
- Publication number 20150041359
- Publication date Feb 12, 2015
- Entegris, Inc.
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD
- Publication number 20140183076
- Publication date Jul 3, 2014
- Entegris, Inc.
- Steven P. Kolbow
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
RETICLE POD
- Publication number 20130020220
- Publication date Jan 24, 2013
- Entegris, Inc.
- Steven P. Kolbow
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES
- Publication number 20110114129
- Publication date May 19, 2011
- Entegris, Inc.
- Oleg P. Kishkovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD
- Publication number 20090301917
- Publication date Dec 10, 2009
- Entegris, Inc.
- Steven Kolbow
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PURGE SYSTEM FOR A SUBSTRATE CONTAINER
- Publication number 20080204680
- Publication date Aug 28, 2008
- Entegris, Inc.
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY
- Publication number 20080121560
- Publication date May 29, 2008
- Entegris, Inc.
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Environmental control in a reticle SMIF pod
- Publication number 20060266011
- Publication date Nov 30, 2006
- David L. Halbmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reticle pod with isolation system
- Publication number 20060260978
- Publication date Nov 23, 2006
- Barry Gregerson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate container with pressure equalization
- Publication number 20060244942
- Publication date Nov 2, 2006
- Barry Gregerson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wafer container door with particulate collecting structure
- Publication number 20050258069
- Publication date Nov 24, 2005
- David L. Halbmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate container with fluid-sealing flow passageway
- Publication number 20050252827
- Publication date Nov 17, 2005
- Anthony Mathius Tieben
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer container washing apparatus
- Publication number 20030102015
- Publication date Jun 5, 2003
- David L. Halbmaier
- B08 - CLEANING
Information Patent Application
Wafer container washing apparatus
- Publication number 20020046760
- Publication date Apr 25, 2002
- David L. Halbmaier
- H01 - BASIC ELECTRIC ELEMENTS

David L. Halbmaier

Person

Patents Grantslast 30 patents

Reticle pod

Substrate container with fluid-sealing flow passageway

Reticle pod

Reticle pod

Reticle pod with isolation system

Substrate container with pressure equalization

Environmental control in a reticle SMIF pod

Substrate container with fluid-sealing flow passageway

Wafer container door with particulate collecting structure

Wafer container washing apparatus

Wafer container washing apparatus

Method of cleaning a wafer carrier

Patents Applicationslast 30 patents

SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY

RETICLE POD

RETICLE POD

METHODS AND APPARATUSES FOR CONTROLLING CONTAMINATION OF SUBSTRATES

RETICLE POD

PURGE SYSTEM FOR A SUBSTRATE CONTAINER

SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY

Environmental control in a reticle SMIF pod

Reticle pod with isolation system

Substrate container with pressure equalization

Wafer container door with particulate collecting structure

Substrate container with fluid-sealing flow passageway

Wafer container washing apparatus

Wafer container washing apparatus