David L. Halbmeier

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Shorewood, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Purge system for a substrate container
- Patent number 8,146,623
- Issue date Apr 3, 2012
- Entegris, Inc.
- Anthony Mathius Tieben
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC