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David L. Walker
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Enosburg Falls, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern compensation techniques for charged particle lithographic m...
Patent number
7,067,220
Issue date
Jun 27, 2006
International Business Machines Corporation
Michael James Lercel
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method and apparatus for multiphase chemical mechanical polishing
Patent number
6,468,135
Issue date
Oct 22, 2002
International Business Machines Corporation
Jose L. Cruz
B08 - CLEANING
Information
Patent Grant
Post CMP cleaning method using a brush cleaner with torque monitor
Patent number
6,352,596
Issue date
Mar 5, 2002
International Business Machines Corporation
Gary Joseph Beardsley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CMP apparatus with built-in slurry distribution and removal
Patent number
6,299,515
Issue date
Oct 9, 2001
International Business Machines Corporation
Gary J. Beardsley
B24 - GRINDING POLISHING
Information
Patent Grant
Post CMP clean brush with torque monitor
Patent number
6,269,510
Issue date
Aug 7, 2001
International Business Machines Corporation
Gary Joseph Beardsley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ/self-propelled polishing pad conditioner and cleaner
Patent number
6,179,693
Issue date
Jan 30, 2001
International Business Machines Corporation
Gary Joseph Beardsley
B24 - GRINDING POLISHING
Information
Patent Grant
CMP apparatus with built-in slurry distribution and removal
Patent number
6,135,865
Issue date
Oct 24, 2000
International Business Machines Corporation
Gary J. Beardsley
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Pattern compensation techniques for charged particle lithographic m...
Publication number
20040110069
Publication date
Jun 10, 2004
International Business Machines Corporation
Michael James Lercel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Post CMP clean brush with torque monitor
Publication number
20020005212
Publication date
Jan 17, 2002
International Business Machines Corporation
Gary J. Beardsley
H01 - BASIC ELECTRIC ELEMENTS