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Fitchburg, MA, US
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last 30 patents
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,940,635
Issue date
Mar 9, 2021
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method and apparatus for processing dielectric materials using micr...
Patent number
10,071,521
Issue date
Sep 11, 2018
MKS Instruments, Inc.
Xing Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,991,098
Issue date
Jun 5, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toroidal plasma abatement apparatus and method
Patent number
9,630,142
Issue date
Apr 25, 2017
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for controlling radio frequency power
Patent number
8,912,835
Issue date
Dec 16, 2014
MKS Instruments Inc.
Siddarth Nagarkatti
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method and system for controlling radio frequency power
Patent number
8,659,335
Issue date
Feb 25, 2014
MKS Instruments, Inc.
Siddharth Nagarkatti
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
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Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20180345569
Publication date
Dec 6, 2018
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20180233333
Publication date
Aug 16, 2018
MKS Instruments, Inc.
Xing Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
Publication number
20170213704
Publication date
Jul 27, 2017
MKS Instruments, Inc.
Xing Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Method and Apparatus for Processing Dielectric Materials Using Micr...
Publication number
20170173846
Publication date
Jun 22, 2017
MKS Instruments, Inc.
Xing Chen
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Toroidal plasma Abatement Apparatus and Method
Publication number
20140262746
Publication date
Sep 18, 2014
MKS Instruments, Inc.
Xing Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
Publication number
20100327927
Publication date
Dec 30, 2010
MKS Instruments, Inc.
Siddharth Nagarkatti
H03 - BASIC ELECTRONIC CIRCUITRY