-
Group VI precursor compounds
-
Patent number 12,173,014
-
Issue date Dec 24, 2024
-
Entegris, Inc.
-
David M. Ermert
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Oxyhalide precursors
-
Patent number 11,919,780
-
Issue date Mar 5, 2024
-
Entegris, Inc.
-
David M. Ermert
-
C01 - INORGANIC CHEMISTRY
-
-
-
-
Method for etching or deposition
-
Patent number 11,624,111
-
Issue date Apr 11, 2023
-
Entegris, Inc.
-
Robert L. Wright
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
Group VI precursor compounds
-
Patent number 11,560,397
-
Issue date Jan 24, 2023
-
Entegris, Inc.
-
David M. Ermert
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-