David McParland

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Inductive antenna for a plasma reactor producing reduced fluorine d...
- Patent number 6,652,712
- Issue date Nov 25, 2003
- Applied Materials, Inc.
- Shiang-Bau Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inductive antenna for a plasma reactor producing reduced fluorine d...
- Publication number 20030111181
- Publication date Jun 19, 2003
- APPLIED MATERIALS, INC.
- Shiang-Bau Wang
- H01 - BASIC ELECTRIC ELEMENTS