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David MILLER
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Rochester, NY, US
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last 30 patents
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Patent Grant
Real-time, non-invasive IEDF plasma sensor
Patent number
11,996,274
Issue date
May 28, 2024
MKS Instruments, Inc.
Linnell Martinez
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Non-Invasive IED Estimation For Pulsed-DC And Low Frequency Applica...
Publication number
20240249914
Publication date
Jul 25, 2024
MKS Instruments, Inc.
Linnell MARTINEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Process Control of Multi-Electrode Systems Equipped with Ion...
Publication number
20240055228
Publication date
Feb 15, 2024
MKS Instruments, Inc.
Linnell MARTINEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Real-Time, Non-Invasive IEDF Plasma Sensor
Publication number
20230326727
Publication date
Oct 12, 2023
MKS Instruments, Inc.
Linnell MARTINEZ
H01 - BASIC ELECTRIC ELEMENTS