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DAVID MUI
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REDWOOD CITY, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Gas mixture including hydrogen fluoride, alcohol and an additive fo...
Patent number
11,823,892
Issue date
Nov 21, 2023
Lam Research AG
Ji Zhu
B08 - CLEANING
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,861,719
Issue date
Dec 8, 2020
Lam Research AG
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,720,343
Issue date
Jul 21, 2020
Lam Research AG
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,679,871
Issue date
Jun 9, 2020
Lam Research AG
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
10,446,416
Issue date
Oct 15, 2019
Lam Research AG
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of particle contaminant removal
Patent number
9,159,593
Issue date
Oct 13, 2015
Lam Research Corporation
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Grant
Apparatus and methods for processing a substrate
Patent number
8,968,485
Issue date
Mar 3, 2015
Lam Research Corporation
Arjun Mendiratta
B08 - CLEANING
Information
Patent Grant
Method and apparatus for removing contaminants from substrate
Patent number
8,758,522
Issue date
Jun 24, 2014
Lam Research Corporation
Ji Zhu
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method of reducing pattern collapse in high aspect ratio nanostruct...
Patent number
8,617,993
Issue date
Dec 31, 2013
Lam Research Corporation
Amir A. Yasseri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for application of two-phase contaminant removal medium
Patent number
8,601,639
Issue date
Dec 10, 2013
Lam Research Corporation
Ji Zhu
B08 - CLEANING
Information
Patent Grant
Acoustic assisted single wafer wet clean for semiconductor wafer pr...
Patent number
8,585,825
Issue date
Nov 19, 2013
Lam Research Corporation
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for application of two-phase contaminant removal medium
Patent number
8,480,809
Issue date
Jul 9, 2013
Lam Research Corporation
Ji Zhu
B08 - CLEANING
Information
Patent Grant
Materials and systems for advanced substrate cleaning
Patent number
8,314,055
Issue date
Nov 20, 2012
Lam Research Corporation
David S. L. Mui
B08 - CLEANING
Information
Patent Grant
Methods for particle removal by single-phase and two-phase media
Patent number
8,226,775
Issue date
Jul 24, 2012
Lam Research Corporation
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Composition of a cleaning material for particle removal
Patent number
8,227,394
Issue date
Jul 24, 2012
Lam Research Corporation
Ji Zhu
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Materials for particle removal by single-phase and two-phase media
Patent number
8,211,846
Issue date
Jul 3, 2012
Lam Research Group
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Composition and application of a two-phase contaminant removal medium
Patent number
8,105,997
Issue date
Jan 31, 2012
Lam Research Corporation
Ji Zhu
B08 - CLEANING
Information
Patent Grant
Apparatus for particle removal by single-phase and two-phase media
Patent number
8,084,406
Issue date
Dec 27, 2011
Lam Research Corporation
David S. L. Mui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Method and apparatus for removing contaminants from substrate
Patent number
7,967,019
Issue date
Jun 28, 2011
Lam Research Corporation
Ji Zhu
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Chamber stability monitoring using an integrated metrology tool
Patent number
7,482,178
Issue date
Jan 27, 2009
Applied Materials, Inc.
David S. L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling a calibration cycle or a metro...
Patent number
7,262,865
Issue date
Aug 28, 2007
Applied Materials, Inc.
David Mui
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for etching material layers with high uniformi...
Patent number
7,250,373
Issue date
Jul 31, 2007
Applied Materials, Inc.
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling accuracy and repeatability of an etch process
Patent number
7,094,613
Issue date
Aug 22, 2006
Applied Materials, Inc.
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for realtime CD microloading control
Patent number
6,924,088
Issue date
Aug 2, 2005
Applied Materials, Inc.
David S. L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a gate structure of a field effect transistor
Patent number
6,924,191
Issue date
Aug 2, 2005
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling critical dimension microloading of photoresis...
Patent number
6,911,399
Issue date
Jun 28, 2005
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methodology for repeatable post etch CD in a production tool
Patent number
6,858,361
Issue date
Feb 22, 2005
David S. L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monitoring substrate processing by detecting reflectively diffracte...
Patent number
6,849,151
Issue date
Feb 1, 2005
Michael S. Barnes
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of providing a shallow trench in a deep-trench device
Patent number
6,703,315
Issue date
Mar 9, 2004
Applied Materials Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-cleaning etch process
Patent number
6,699,399
Issue date
Mar 2, 2004
Applied Materials, Inc.
Xue-Yu Qian
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...
Publication number
20240038526
Publication date
Feb 1, 2024
LAM RESEARCH AG
Ji ZHU
B08 - CLEANING
Information
Patent Application
VAPOR CLEANING OF SUBSTRATE SURFACES
Publication number
20220356585
Publication date
Nov 10, 2022
LAM RESEARCH CORPORATION
David MUI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS MIXTURE INCLUDING HYDROGEN FLUORIDE, ALCOHOL AND AN ADDITIVE FO...
Publication number
20210391166
Publication date
Dec 16, 2021
LAM RESEARCH AG
Ji ZHU
B08 - CLEANING
Information
Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
Publication number
20210366738
Publication date
Nov 25, 2021
LAM RESEARCH AG
Bhaskar BANDARAPU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20200227284
Publication date
Jul 16, 2020
LAM RESEARCH AG
David MUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20180047593
Publication date
Feb 15, 2018
LAM RESEARCH AG
David MUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20170345681
Publication date
Nov 30, 2017
LAM RESEARCH AG
David MUI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Pr...
Publication number
20140034096
Publication date
Feb 6, 2014
LAM RESEARCH CORPORATION
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR PROCESSING A SUBSTRATE
Publication number
20130081655
Publication date
Apr 4, 2013
LAM RESEARCH CORPORATION
Arjun Mendiratta
B08 - CLEANING
Information
Patent Application
Methods for Application of Two-Phase Contaminant Removal Medium
Publication number
20120132229
Publication date
May 31, 2012
LAM RESEARCH CORPORATION
Ji Zhu
B08 - CLEANING
Information
Patent Application
Apparatus for Application of Two-Phase Contaminant Removal Medium
Publication number
20120132235
Publication date
May 31, 2012
LAM RESEARCH CORPORATION
Ji Zhu
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20120132234
Publication date
May 31, 2012
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Removing Contaminants from Substrate
Publication number
20120125375
Publication date
May 24, 2012
LAM RESEARCH CORPORATION
Ji Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING PATTERN COLLAPSE IN HIGH ASPECT RATIO NANOSTRUC...
Publication number
20110189858
Publication date
Aug 4, 2011
LAM RESEARCH CORPORATION
Amir A. Yasseri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PARTICLE CONTAMINANT REMOVAL
Publication number
20100313917
Publication date
Dec 16, 2010
Lam Research Corp.
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO...
Publication number
20100258142
Publication date
Oct 14, 2010
Mark Naoshi Kawaguchi
B08 - CLEANING
Information
Patent Application
COMPOSITION OF A CLEANING MATERIAL FOR PARTICLE REMOVAL
Publication number
20100120647
Publication date
May 13, 2010
LAM RESEARCH CORPORATION
Ji Zhu
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
COMPOSITION AND APPLICATION OF A TWO-PHASE CONTAMINANT REMOVAL MEDIUM
Publication number
20100116290
Publication date
May 13, 2010
LAM RESEARCH CORPORATION
Ji Zhu
B08 - CLEANING
Information
Patent Application
ACOUSTIC ASSISTED SINGLE WAFER WET CLEAN FOR SEMICONDUCTOR WAFER PR...
Publication number
20100108093
Publication date
May 6, 2010
Lam Research Corp.
Grant Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIALS AND SYSTEMS FOR ADVANCED SUBSTRATE CLEANING
Publication number
20100016202
Publication date
Jan 21, 2010
LAM RESEARCH CORPORATION
David S. L. Mui
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090151757
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090151752
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIALS FOR PARTICLE REMOVAL BY SINGLE-PHASE AND TWO-PHASE MEDIA
Publication number
20090156452
Publication date
Jun 18, 2009
David S.L. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Removing Contaminants from Substrate
Publication number
20090151754
Publication date
Jun 18, 2009
LAM RESEARCH CORPORATION
Ji Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etch pattern definition using a CVD organic layer as an anti-reflec...
Publication number
20080197109
Publication date
Aug 21, 2008
Applied Materials, Inc.
David S. Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING MATERIAL LAYERS WITH HIGH UNIFORMI...
Publication number
20070295455
Publication date
Dec 27, 2007
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING MATERIAL LAYERS WITH HIGH UNIFORMI...
Publication number
20070202706
Publication date
Aug 30, 2007
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for controlling etch processes during fabricat...
Publication number
20060091108
Publication date
May 4, 2006
APPLIED MATERIALS, INC.
David S L Mui
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for etching material layers with high uniformi...
Publication number
20060046496
Publication date
Mar 2, 2006
APPLIED MATERIALS, INC.
David Mui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for controlling a calibration cycle or a metro...
Publication number
20050190381
Publication date
Sep 1, 2005
APPLIED MATERIALS, INC.
David Mui
G01 - MEASURING TESTING