David P. Klaus

Follow

Person

Yorktown Heights, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
High resolution silicon-containing resist
- Patent number 7,659,050
- Issue date Feb 9, 2010
- International Business Machines Corporation
- James J. Bucchignano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for using negative tone silicon-containing resist for e-beam...
- Patent number 7,399,573
- Issue date Jul 15, 2008
- International Business Machines Corporation
- Wu-Song S. Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
NEGATIVE TONE SILICON-CONTAINING RESIST FOR E-BEAM LITHOGRAPHY
- Publication number 20080102400
- Publication date May 1, 2008
- International Business Machines Corporation
- Wu-Song S. Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High resolution silicon-containing resist
- Publication number 20060275694
- Publication date Dec 7, 2006
- International Business Machines Corporation
- James J. Bucchignano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY