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David P. Sporleder

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  • Billerica, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Hydraulic feed system for an ion source
    • Patent number 12,154,763
    • Issue date Nov 26, 2024
    • Axcelis Technologies, Inc.
    • Neil J. Bassom
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    System and method for extending a lifetime of an ion source for mol...
    • Patent number 11,756,772
    • Issue date Sep 12, 2023
    • Axcelis Technologies, Inc.
    • David Sporleder
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Hydraulic feed system for an ion source
    • Patent number 11,728,140
    • Issue date Aug 15, 2023
    • Axcelis Technologies, Inc.
    • Neil J. Bassom
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion source with multiple bias electrodes
    • Patent number 11,545,330
    • Issue date Jan 3, 2023
    • Axcelis Technologies, Inc.
    • Wilhelm Platow
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dynamic temperature control of an ion source
    • Patent number 10,347,457
    • Issue date Jul 9, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Alexander S. Perel
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vaporizer for ion source
    • Patent number 9,928,983
    • Issue date Mar 27, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Craig R. Chaney
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Dual material repeller
    • Patent number 9,824,846
    • Issue date Nov 21, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • William Davis Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Extended lifetime ion source
    • Patent number 9,187,832
    • Issue date Nov 17, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Costel Biloiu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Technique for ion implanting a target
    • Patent number 8,937,003
    • Issue date Jan 20, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Alexander S. Perel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents