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David R. Hammerich
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Chandler, AZ, US
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last 30 patents
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Patent Grant
Coated semiconductor processing members having chlorine and fluorin...
Patent number
10,388,492
Issue date
Aug 20, 2019
FM Industries, Inc.
Mahmood Naim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Emissivity controlled coatings for semiconductor chamber components
Patent number
9,790,581
Issue date
Oct 17, 2017
FM Industries, Inc.
Mahmood Naim
C01 - INORGANIC CHEMISTRY
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Patent Grant
Heated electrostatic chuck and semiconductor wafer heater and metho...
Patent number
9,543,183
Issue date
Jan 10, 2017
FM Industries, Inc.
Jae Yong Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
COATED SEMICONDUCTOR PROCESSING MEMBERS HAVING CHLORINE AND FLUORIN...
Publication number
20170301519
Publication date
Oct 19, 2017
FM INDUSTRIES, INC.
Mahmood NAIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EMISSIVITY CONTROLLED COATINGS FOR SEMICONDUCTOR CHAMBER COMPONENTS
Publication number
20150376760
Publication date
Dec 31, 2015
FM INDUSTRIES, INC.
Mahmood NAIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATED ELECTROSTATIC CHUCK AND SEMICONDUCTOR WAFER HEATER AND METHO...
Publication number
20140291311
Publication date
Oct 2, 2014
FM INDUSTRIES, INC.
Jae Yong Cho
H01 - BASIC ELECTRIC ELEMENTS