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David R. Timberlake
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Marblehead, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Real time photoresist outgassing control system and method
Patent number
11,749,500
Issue date
Sep 5, 2023
Applied Materials, Inc.
Nevin Clay
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and mechanism for erosion detection of defining apertures
Patent number
9,299,534
Issue date
Mar 29, 2016
Varian Semiconductor Equipment Associates, Inc.
David Timberlake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
Patent number
9,006,692
Issue date
Apr 14, 2015
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and techniques for controlling ion implantation uniformity
Patent number
8,853,653
Issue date
Oct 7, 2014
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for glitch recovery in stationary-beam ion im...
Patent number
7,361,913
Issue date
Apr 22, 2008
Varian Semiconductor Equipment Associates, Inc.
Russell J. Low
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
REAL TIME PHOTORESIST OUTGASSING CONTROL SYSTEM AND METHOD
Publication number
20230238214
Publication date
Jul 27, 2023
Applied Materials, Inc.
Nevin Clay
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND MECHANISM FOR EROSION DETECTION OF DEFINING APERTURES
Publication number
20150221472
Publication date
Aug 6, 2015
Varian Semiconductor Equipment Associates, Inc.
David Timberlake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND TECHNIQUES FOR CONTROLLING ION IMPLANTATION UNIFORMITY
Publication number
20140326179
Publication date
Nov 6, 2014
Varian Semiconductor Equipment Associates, Inc.
Stanislav S. Todorov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and apparatus for glitch recovery in stationary-beam ion im...
Publication number
20060219954
Publication date
Oct 5, 2006
Russell J. Low
H01 - BASIC ELECTRIC ELEMENTS