David S. Alles

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Covent Station, NJ, US

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Patents Grantslast 30 patents

Information Patent Grant
Defining a low-density pattern in a photoresist with an electron be...
- Patent number 4,163,155
- Issue date Jul 31, 1979
- Bell Telephone Laboratories, Incorporated
- David S. Alles
- B82 - NANO-TECHNOLOGY