David Schaefer

Person

Vancouver, WA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 11,781,650
- Issue date Oct 10, 2023
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge ring dimensioned to extend lifetime of elastomer seal in a pla...
- Patent number 10,804,081
- Issue date Oct 13, 2020
- Lam Research Corporation
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Universal non-invasive chamber impedance measurement system and ass...
- Patent number 10,109,460
- Issue date Oct 23, 2018
- Lam Research Corporation
- Chin-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Window and mounting arrangement for twist-and-lock gas injector ass...
- Patent number 9,947,512
- Issue date Apr 17, 2018
- Lam Research Corporation
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,869,392
- Issue date Jan 16, 2018
- Lam Research Corporation
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Edge seal for lower electrode assembly
- Patent number 9,859,142
- Issue date Jan 2, 2018
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Long lifetime thermal spray coating for etching or deposition chamb...
- Patent number 9,790,582
- Issue date Oct 17, 2017
- Lam Research Corporation
- Chin-Yi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Installation fixture for elastomer bands
- Patent number 9,583,377
- Issue date Feb 28, 2017
- Lam Research Corporation
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Installation fixture for elastomer bands and methods of using the same
- Patent number 9,355,884
- Issue date May 31, 2016
- Lam Research Corporation
- Rish Chhatre
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for performing hot water seal on electrostatic chuck
- Patent number 9,054,148
- Issue date Jun 9, 2015
- Lam Research Corporation
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Installation fixture for elastomer bands and methods of using the same
- Patent number 8,844,106
- Issue date Sep 30, 2014
- Lam Research Corporation
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for critical dimension control during plasma etching
- Patent number 7,622,051
- Issue date Nov 24, 2009
- Lam Research Corporation
- David M. Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixture for removing photoresist and post etch residue from low...
- Patent number 7,479,457
- Issue date Jan 20, 2009
- Lam Research Corporation
- Cristian Paduraru
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sacrificial layer for protection during trench etch
- Patent number 7,205,226
- Issue date Apr 17, 2007
- Lam Research Corporation
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20240077138
- Publication date Mar 7, 2024
- LAM RESEARCH CORPORATION
- David SCHAEFER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Universal Non-Invasive Chamber Impedance Measurement System and Ass...
- Publication number 20180151331
- Publication date May 31, 2018
- LAM RESEARCH CORPORATION
- Chin-Yi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20180106371
- Publication date Apr 19, 2018
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
LONG LIFETIME THERMAL SPRAY COATING FOR ETCHING OR DEPOSITION CHAMB...
- Publication number 20160312351
- Publication date Oct 27, 2016
- LAM RESEARCH CORPORATION
- Chin-Yi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20150235889
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- Hong Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...
- Publication number 20150179412
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Ambarish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSTALLATION FIXTURE FOR ELASTOMER BANDS
- Publication number 20150170942
- Publication date Jun 18, 2015
- LAM RESEARCH CORPORATION
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME
- Publication number 20140366360
- Publication date Dec 18, 2014
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130340942
- Publication date Dec 26, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME
- Publication number 20130117986
- Publication date May 16, 2013
- LAM RESEARCH CORPORATION
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY
- Publication number 20130097840
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- David Schaefer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WINDOW AND MOUNTING ARRANGEMENT FOR TWIST-AND-LOCK GAS INJECTOR ASS...
- Publication number 20130098554
- Publication date Apr 25, 2013
- LAM RESEARCH CORPORATION
- Rish Chhatre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK
- Publication number 20130052339
- Publication date Feb 28, 2013
- Hong Shih
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Gas mixture for removing photoresist and post etch residue from low...
- Publication number 20070054496
- Publication date Mar 8, 2007
- Cristian Paduraru
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

David Schaefer

Person

Patents Grantslast 30 patents

Edge seal for lower electrode assembly

Edge ring dimensioned to extend lifetime of elastomer seal in a pla...

Universal non-invasive chamber impedance measurement system and ass...

Window and mounting arrangement for twist-and-lock gas injector ass...

Edge seal for lower electrode assembly

Edge seal for lower electrode assembly

Long lifetime thermal spray coating for etching or deposition chamb...

Installation fixture for elastomer bands

Installation fixture for elastomer bands and methods of using the same

Method for performing hot water seal on electrostatic chuck

Installation fixture for elastomer bands and methods of using the same

Methods for critical dimension control during plasma etching

Gas mixture for removing photoresist and post etch residue from low...

Sacrificial layer for protection during trench etch

Patents Applicationslast 30 patents

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

Universal Non-Invasive Chamber Impedance Measurement System and Ass...

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

LONG LIFETIME THERMAL SPRAY COATING FOR ETCHING OR DEPOSITION CHAMB...

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLA...

INSTALLATION FIXTURE FOR ELASTOMER BANDS

INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME

EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

WINDOW AND MOUNTING ARRANGEMENT FOR TWIST-AND-LOCK GAS INJECTOR ASS...

SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK

Gas mixture for removing photoresist and post etch residue from low...