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Meridian, ID, US
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last 30 patents
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Patent Grant
High-frequency electrostatically shielded toroidal plasma and radic...
Patent number
6,634,313
Issue date
Oct 21, 2003
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
High-Frequency electrostatically shielded toroidal plasma and radic...
Publication number
20040237897
Publication date
Dec 2, 2004
Hiroji Hanawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
High-frequency electrostatically shielded toroidal plasma and radic...
Publication number
20020108713
Publication date
Aug 15, 2002
APPLIED MATERIALS, INC.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS