David Suuronen

Person

Newburyport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for reduced workpiece adhesion due to electrostat...
- Patent number 10,825,645
- Issue date Nov 3, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 10,658,207
- Issue date May 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for in situ temperature measurement
- Patent number 10,113,917
- Issue date Oct 30, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- G01 - MEASURING TESTING
Information Patent Grant
Platen for reducing particle contamination on a substrate and a met...
- Patent number 9,953,849
- Issue date Apr 24, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for implantation of semiconductor wafers having high bulk re...
- Patent number 9,824,857
- Issue date Nov 21, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Michael W. Osborne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High conductivity electrostatic chuck
- Patent number 9,692,325
- Issue date Jun 27, 2017
- Entegris, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for analyzing voltage breakdown in electrostatic...
- Patent number 9,417,280
- Issue date Aug 16, 2016
- Varian Semiconductor Associates, Inc.
- David E. Suuronen
- G01 - MEASURING TESTING
Information Patent Grant
Triboelectric charge controlled electrostatic clamp
- Patent number 9,082,804
- Issue date Jul 14, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High surface resistivity electrostatic chuck
- Patent number 9,025,305
- Issue date May 5, 2015
- Entegris, Inc.
- Richard A. Cooke
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Platen ground pin for connecting substrate to ground
- Patent number 8,681,472
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen clamping surface monitoring
- Patent number 8,592,786
- Issue date Nov 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removal of charge between a substrate and an electrostatic clamp
- Patent number 8,531,814
- Issue date Sep 10, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Platen cleaning method
- Patent number 8,268,081
- Issue date Sep 18, 2012
- Varian Semiconductor Equipment Associates, Inc.
- David Suuronen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with separated electrodes
- Patent number 7,715,170
- Issue date May 11, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Julian G. Blake
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Clamp for use in processing semiconductor workpieces
- Patent number 7,595,972
- Issue date Sep 29, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Richard Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Current limiting fuse
- Patent number 5,426,411
- Issue date Jun 20, 1995
- Gould Electronics Inc.
- Robert M. Pimpis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Current limiting fuse
- Patent number 5,357,234
- Issue date Oct 18, 1994
- Gould Electronics Inc.
- Robert M. Pimpis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fuse with thin film fusible element supported on a substrate
- Patent number 5,148,141
- Issue date Sep 15, 1992
- Gould Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fuse with thin film fusible element supported on a substrate
- Patent number 5,115,220
- Issue date May 19, 1992
- Gould, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film fusible element
- Patent number 5,091,712
- Issue date Feb 25, 1992
- Gould Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric fuse
- Patent number 4,962,977
- Issue date Oct 16, 1990
- Gould Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cartridge fuse terminal adapter
- Patent number 4,950,195
- Issue date Aug 21, 1990
- Gould, Inc.
- Richard J. Perreault
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System And Method For Reduced Workpiece Adhesion Due To Electrostat...
- Publication number 20190057835
- Publication date Feb 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
Platen For Reducing Particle Contamination On A Substrate and a Met...
- Publication number 20180233386
- Publication date Aug 16, 2018
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPLANTATION OF SEMICONDUCTOR WAFERS HAVING HIGH BULK RE...
- Publication number 20170207063
- Publication date Jul 20, 2017
- Michael W. Osborne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For In Situ Temperature Measurement
- Publication number 20170131154
- Publication date May 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- G01 - MEASURING TESTING
Information Patent Application
Platen For Reducing Particle Contamination On A Substrate And A Met...
- Publication number 20150279704
- Publication date Oct 1, 2015
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ANALYZING VOLTAGE BREAKDOWN IN ELECTROSTATIC...
- Publication number 20140324372
- Publication date Oct 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- G01 - MEASURING TESTING
Information Patent Application
PLATEN CLAMPING SURFACE MONITORING
- Publication number 20130248738
- Publication date Sep 26, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Conductivity Electrostatic Chuck
- Publication number 20130155569
- Publication date Jun 20, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David Suuronen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
High Surface Resistivity Electrostatic Chuck
- Publication number 20130070384
- Publication date Mar 21, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Richard A. Cooke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PLATEN CLEANING METHOD
- Publication number 20130037052
- Publication date Feb 14, 2013
- Varian Semiconductor Equipment Associates, Inc.
- David Suuronen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP
- Publication number 20120200980
- Publication date Aug 9, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Julian Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLATEN TO CONTROL CHARGE ACCUMULATION
- Publication number 20110036990
- Publication date Feb 17, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
- Publication number 20100265631
- Publication date Oct 21, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Dale K. Stone
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen Cleaning Method
- Publication number 20100083980
- Publication date Apr 8, 2010
- David Suuronen
- B08 - CLEANING
Information Patent Application
PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...
- Publication number 20090317964
- Publication date Dec 24, 2009
- Varian Semiconductor Equipment Associates, Inc.
- David E. SUURONEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMBOSSED ELECTROSTATIC CHUCK
- Publication number 20090122458
- Publication date May 14, 2009
- VARIAN SEMICONDUCTOR EPUIPMENT ASSOCIATED, INC.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES
- Publication number 20080239614
- Publication date Oct 2, 2008
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamp for use in processing semiconductor workpieces
- Publication number 20060171094
- Publication date Aug 3, 2006
- Richard Muka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for reducing backside particles
- Publication number 20060124155
- Publication date Jun 15, 2006
- David Edwin Suuronen
- B08 - CLEANING
Information Patent Application
Clamp for use in processing semiconductor workpieces
- Publication number 20060012939
- Publication date Jan 19, 2006
- Varian Semiconductor Equipment Associates, Inc.
- David E. Suuronen
- H01 - BASIC ELECTRIC ELEMENTS

David Suuronen

Person

Patents Grantslast 30 patents

System and method for reduced workpiece adhesion due to electrostat...

Platen for reducing particle contamination on a substrate and a met...

System and method for in situ temperature measurement

Platen for reducing particle contamination on a substrate and a met...

Method for implantation of semiconductor wafers having high bulk re...

High conductivity electrostatic chuck

System and method for analyzing voltage breakdown in electrostatic...

Triboelectric charge controlled electrostatic clamp

High surface resistivity electrostatic chuck

Platen ground pin for connecting substrate to ground

Platen clamping surface monitoring

Removal of charge between a substrate and an electrostatic clamp

Platen cleaning method

Electrostatic chuck with separated electrodes

Clamp for use in processing semiconductor workpieces

Current limiting fuse

Current limiting fuse

Fuse with thin film fusible element supported on a substrate

Fuse with thin film fusible element supported on a substrate

Thin film fusible element

Electric fuse

Cartridge fuse terminal adapter

Patents Applicationslast 30 patents

System And Method For Reduced Workpiece Adhesion Due To Electrostat...

Platen For Reducing Particle Contamination On A Substrate and a Met...

METHOD FOR IMPLANTATION OF SEMICONDUCTOR WAFERS HAVING HIGH BULK RE...

System And Method For In Situ Temperature Measurement

Platen For Reducing Particle Contamination On A Substrate And A Met...

SYSTEM AND METHOD FOR ANALYZING VOLTAGE BREAKDOWN IN ELECTROSTATIC...

PLATEN CLAMPING SURFACE MONITORING

High Conductivity Electrostatic Chuck

High Surface Resistivity Electrostatic Chuck

PLATEN CLEANING METHOD

TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP

PLATEN TO CONTROL CHARGE ACCUMULATION

REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP

Platen Cleaning Method

PLATEN FOR REDUCING PARTICLE CONTAMINATION ON A SUBSTRATE AND A MET...

EMBOSSED ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES

Clamp for use in processing semiconductor workpieces

Technique for reducing backside particles

Clamp for use in processing semiconductor workpieces