David T. Frost

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-station disk finishing apparatus and method
- Patent number 7,160,172
- Issue date Jan 9, 2007
- Xyratex Technology Ltd.
- David Frost
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated substrate processing system
- Patent number 6,637,446
- Issue date Oct 28, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Disk cascade scrubber
- Patent number 6,625,835
- Issue date Sep 30, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for performing two wafer preparation operations on verticall...
- Patent number 6,616,509
- Issue date Sep 9, 2003
- Lam Research Corporation
- David T. Frost
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer cascade scrubber
- Patent number 6,588,043
- Issue date Jul 8, 2003
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer preparation systems and methods for preparing wafers
- Patent number 6,482,678
- Issue date Nov 19, 2002
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Off-diameter method for preparing semiconductor wafers
- Patent number 6,461,224
- Issue date Oct 8, 2002
- Lam Research Corporation
- David T. Frost
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing in an immersion, scrub and dry system
- Patent number 6,457,199
- Issue date Oct 1, 2002
- Lam Research Corporation
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate polishing system using roll-to-roll fixed abrasive
- Patent number 6,439,978
- Issue date Aug 27, 2002
- Oliver Design, Inc.
- Oliver David Jones
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer preparation apparatus including variable height wafer drive a...
- Patent number 6,368,192
- Issue date Apr 9, 2002
- Lam Research Corporation
- Oliver David Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for chemical mechanical polishing
- Patent number 6,347,977
- Issue date Feb 19, 2002
- Lam Research Corporation
- David T. Frost
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Small form factor cascade scrubber
- Publication number 20070006406
- Publication date Jan 11, 2007
- Xyratex Technologies Ltd.
- John McEntee
- B08 - CLEANING
Information Patent Application
Multi-station disk finishing apparatus and method
- Publication number 20060135042
- Publication date Jun 22, 2006
- David T. Frost
- B24 - GRINDING POLISHING
Information Patent Application
Integrated substrate processing system
- Publication number 20020184720
- Publication date Dec 12, 2002
- Lam Research Corp.
- David T. Frost
- H01 - BASIC ELECTRIC ELEMENTS

David T. Frost

Person

Patents Grantslast 30 patents

Multi-station disk finishing apparatus and method

Integrated substrate processing system

Disk cascade scrubber

Method for performing two wafer preparation operations on verticall...

Wafer cascade scrubber

Wafer preparation systems and methods for preparing wafers

Off-diameter method for preparing semiconductor wafers

Substrate processing in an immersion, scrub and dry system

Substrate polishing system using roll-to-roll fixed abrasive

Wafer preparation apparatus including variable height wafer drive a...

Method and system for chemical mechanical polishing

Patents Applicationslast 30 patents

Small form factor cascade scrubber

Multi-station disk finishing apparatus and method

Integrated substrate processing system