David Tao

Follow

Person

Saugus, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method of ion beam control in response to a beam glitch
- Patent number 7,507,977
- Issue date Mar 24, 2009
- Axcelis Technologies, Inc.
- Que Weiguo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Segmented cold plate for rapid thermal processing (RTP) tool for co...
- Patent number 7,166,187
- Issue date Jan 23, 2007
- Axcelis Technologies, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Segmented cold plate for rapid thermal processing (RTP) tool for co...
- Patent number 6,783,630
- Issue date Aug 31, 2004
- Axcelis Technologies, Inc.
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical path improvement, focus length change compensation, and str...
- Patent number 6,695,886
- Issue date Feb 24, 2004
- Axcelis Technologies, Inc.
- Douglas Brown
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System and method of ion beam control in response to a beam glitch
- Publication number 20080067433
- Publication date Mar 20, 2008
- Axcelis Technologies, Inc.
- Que Weiguo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Segmented cold plate for rapid thermal processing (RTP) tool for co...
- Publication number 20050026447
- Publication date Feb 3, 2005
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for cooling a substrate through thermal conduction in the...
- Publication number 20040053514
- Publication date Mar 18, 2004
- Ali Shajii
- G05 - CONTROLLING REGULATING
Information Patent Application
Segmented cold plate for rapid thermal processing (RTP) tool for co...
- Publication number 20040040508
- Publication date Mar 4, 2004
- Ali Shajii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL PATH IMPROVEMENT, FOCUS LENGTH CHANGE COMPENSATION, AND STR...
- Publication number 20040037347
- Publication date Feb 26, 2004
- Douglas Brown
- G01 - MEASURING TESTING