David Tien

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for detecting and correcting problematic advanced...
- Patent number 10,295,993
- Issue date May 21, 2019
- KLA-Tencor Corporation
- Dongsub Choi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Overlay target geometry for measuring multiple pitches
- Patent number 9,709,903
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- DongSub Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hybrid imaging and scatterometry targets
- Patent number 9,476,838
- Issue date Oct 25, 2016
- KLA-Tencor Corporation
- DongSub Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focus monitoring method using asymmetry embedded imaging target
- Patent number 9,466,100
- Issue date Oct 11, 2016
- KLA-Tencor Corporation
- DongSub Choi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Focus recipe determination for a lithographic scanner
- Patent number 9,291,920
- Issue date Mar 22, 2016
- KLA-Tencor Corporation
- James Manka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Advanced process control optimization
- Patent number 8,655,469
- Issue date Feb 18, 2014
- KLA-Tencor Corporation
- DongSub Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTIMIZING THE UTILIZATION OF METROLOGY TOOLS
- Publication number 20160131983
- Publication date May 12, 2016
- KLA-Tencor Corporation
- Tsachy Holovinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HYBRID IMAGING AND SCATTEROMETRY TARGETS
- Publication number 20140375984
- Publication date Dec 25, 2014
- DongSub Choi
- G01 - MEASURING TESTING
Information Patent Application
Focus Recipe Determination for a Lithographic Scanner
- Publication number 20140063478
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- James Manka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focus Monitoring Method Using Asymmetry Embedded Imaging Target
- Publication number 20130336572
- Publication date Dec 19, 2013
- DongSub Choi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY TARGET GEOMETRY FOR MEASURING MULTIPLE PITCHES
- Publication number 20130107259
- Publication date May 2, 2013
- KLA-Tencor Corporation
- Dongsub Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR DETECTING AND CORRECTING PROBLEMATIC ADVANCED...
- Publication number 20130060354
- Publication date Mar 7, 2013
- KLA-Tencor Corporation
- Dongsub Choi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ADVANCED PROCESS CONTROL OPTIMIZATION
- Publication number 20120022679
- Publication date Jan 26, 2012
- KLA-Tencor Corporation
- DongSub Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Method and system for detecting and correcting problematic advanced...

Overlay target geometry for measuring multiple pitches

Hybrid imaging and scatterometry targets

Focus monitoring method using asymmetry embedded imaging target

Focus recipe determination for a lithographic scanner

Advanced process control optimization

Patents Applicationslast 30 patents

OPTIMIZING THE UTILIZATION OF METROLOGY TOOLS

HYBRID IMAGING AND SCATTEROMETRY TARGETS

Focus Recipe Determination for a Lithographic Scanner

Focus Monitoring Method Using Asymmetry Embedded Imaging Target

OVERLAY TARGET GEOMETRY FOR MEASURING MULTIPLE PITCHES

METHOD AND SYSTEM FOR DETECTING AND CORRECTING PROBLEMATIC ADVANCED...

ADVANCED PROCESS CONTROL OPTIMIZATION