David Ullstrom

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Azimuthally tunable multi-zone electrostatic chuck
- Patent number 11,622,419
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Azimuthally tunable multi-zone electrostatic chuck
- Patent number 10,440,777
- Issue date Oct 8, 2019
- Applied Materials, Inc.
- Chunlei Zhang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
- Publication number 20200037399
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Chunlei ZHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM WITH SHARED VACUUM SYSTEM
- Publication number 20180061679
- Publication date Mar 1, 2018
- Applied Materials, Inc.
- Fernando M. SILVEIRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AZIMUTHALLY TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK
- Publication number 20160345384
- Publication date Nov 24, 2016
- Applied Materials, Inc.
- Chunlei Zhang
- H01 - BASIC ELECTRIC ELEMENTS