David W. Mytton

Follow

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for etching a gold metal layer using a titaniu...
- Patent number 6,554,952
- Issue date Apr 29, 2003
- Lam Research Corporation
- Gladys So-Wan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a gold metal layer using a titanium hardmask
- Patent number 6,306,312
- Issue date Oct 23, 2001
- Lam Research Corporation
- Gladys So-Wan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...