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COBALT CVD
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DIPTUBE APPARATUS AND DELIVERY METHOD
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Publication number 20110210142
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Publication date Sep 1, 2011
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Ronald F. Spohn
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BUBBLER APPARATUS AND DELIVERY METHOD
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Publication number 20080182010
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Publication date Jul 31, 2008
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Ronald F. Spohn
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Publication number 20080182023
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Publication date Jul 31, 2008
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ORGANOALUMINUM PRECURSOR COMPOUNDS
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Praxair Technology, Inc.
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David W. Peters
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