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David Y. Chan
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Austin, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Disposable hard mask for photomask plasma etching
Patent number
6,908,716
Issue date
Jun 21, 2005
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Disposable hard mask for photomask plasma etching
Patent number
6,749,974
Issue date
Jun 15, 2004
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Disposable hard mask for phase shift photomask plasma etching
Patent number
6,682,861
Issue date
Jan 27, 2004
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Electrical critical dimension measurements on photomasks
Patent number
6,537,708
Issue date
Mar 25, 2003
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Disposable hard mask for photomask plasma etching
Patent number
6,472,107
Issue date
Oct 29, 2002
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Disposable hard mask for photomask plasma etching
Publication number
20040209173
Publication date
Oct 21, 2004
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Disposable hard mask for phase shift photomask plasma etching
Publication number
20030186137
Publication date
Oct 2, 2003
Photronics, Inc.
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Disposable hard mask for photomask plasma etching
Publication number
20030013023
Publication date
Jan 16, 2003
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Electrical critical dimension measurements on photomasks
Publication number
20020102472
Publication date
Aug 1, 2002
David Y. Chan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY