David Yang

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Union City, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Organic line width roughness with H2 plasma treatment
- Patent number 8,298,958
- Issue date Oct 30, 2012
- Lam Research Corporation
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ORGANIC LINE WIDTH ROUGHNESS WITH H2 PLASMA TREATMENT
- Publication number 20130087284
- Publication date Apr 11, 2013
- LAM RESEARCH CORPORATION
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC LINE WIDTH ROUGHNESS WITH H2 PLASMA TREATMENT
- Publication number 20100015809
- Publication date Jan 21, 2010
- LAM RESEARCH CORPORATION
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS