David Zhehao Chen

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for measuring temperature of substrate in vacuum...
- Patent number 9,443,715
- Issue date Sep 13, 2016
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Yousen Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR MEASURING TEMPERATURE OF SUBSTRATE IN VACUUM...
- Publication number 20130292370
- Publication date Nov 7, 2013
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Yousen Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...