Dawei SUN

Person

Lynnfield, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chuck for processing semiconductor workpieces at high temperatures
- Patent number 12,046,503
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Producing a ribbon or wafer with regions of low oxygen concentration
- Patent number 11,885,036
- Issue date Jan 30, 2024
- Jesse S. Appel
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for dissipating workpiece charge build up
- Patent number 11,864,299
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- David Morrell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Solid state heater and method of manufacture
- Patent number 11,665,786
- Issue date May 30, 2023
- Applied Materials, Inc.
- David Morrell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for calibration of substrate temperature using...
- Patent number 11,543,296
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Eric D. Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid control system for workpiece heating
- Patent number 11,545,375
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- James D. Strassner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced substrate temperature measurement apparatus, system and me...
- Patent number 11,473,978
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Grant
Deflectable platens and associated methods
- Patent number 11,302,536
- Issue date Apr 12, 2022
- Applied Materials, Inc.
- Ming Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflectable platen and associated method
- Patent number 11,133,213
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube electrostatic chuck
- Patent number 11,069,554
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for achieving sustained anisotropic crystal growth on the su...
- Patent number 10,662,548
- Issue date May 26, 2020
- Leading Edge Crystal Technologies, Inc.
- Brian H. Mackintosh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for forming crystalline sheet from a melt
- Patent number 10,526,720
- Issue date Jan 7, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and method for crystalline sheet growth
- Patent number 10,179,958
- Issue date Jan 15, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for achieving sustained anisotropic crystal growth on the su...
- Patent number 9,970,125
- Issue date May 15, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Brian H. Mackintosh
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and method for crystalline sheet growth using a cold block a...
- Patent number 9,957,636
- Issue date May 1, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Sheet production apparatus for removing a crystalline sheet from th...
- Patent number 9,677,193
- Issue date Jun 13, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for improving temperature uniformity of a workpiece
- Patent number 9,633,875
- Issue date Apr 25, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removing a sheet from the surface of a melt using elasticity and bu...
- Patent number 8,764,901
- Issue date Jul 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Removing a sheet from the surface of a melt using gas jets
- Patent number 8,685,162
- Issue date Apr 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
- Publication number 20240087839
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Dawei Sun
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR DISSIPATING WORKPIECE CHARGE BUILD UP
- Publication number 20230371160
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- David Morrell
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Model-Based Controlled Load Lock Pumping Scheme
- Publication number 20230138326
- Publication date May 4, 2023
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck For Processing Semiconductor Workpieces At High Temperatures
- Publication number 20230132307
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCING A RIBBON OR WAFER WITH REGIONS OF LOW OXYGEN CONCENTRATION
- Publication number 20220316087
- Publication date Oct 6, 2022
- Leading Edge Equipment Technologies, Inc.
- Alison Greenlee
- C30 - CRYSTAL GROWTH
Information Patent Application
DEFLECTABLE PLATENS AND ASSOCIATED METHODS
- Publication number 20220189784
- Publication date Jun 16, 2022
- Applied Materials, Inc.
- Ming Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON NANOTUBE ELECTROSTATIC CHUCK
- Publication number 20210225682
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Dawei Sun
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Solid State Heater And Method Of Manufacture
- Publication number 20210176824
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- David Morrell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFLECTABLE PLATEN AND ASSOCIATED METHOD
- Publication number 20210134650
- Publication date May 6, 2021
- Applied Materials, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFLECTABLE PLATENS AND ASSOCIATED METHODS
- Publication number 20210118692
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Ming Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Hybrid Control System For Workpiece Heating
- Publication number 20200395233
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- James D. Strassner
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...
- Publication number 20200378832
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Eric D. Wilson
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
- Publication number 20200381271
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
- Publication number 20200378837
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT
- Publication number 20200115819
- Publication date Apr 16, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Dawei SUN
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...
- Publication number 20180202066
- Publication date Jul 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Brian H. Mackintosh
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR CRYSTALLINE SHEET GROWTH
- Publication number 20180080142
- Publication date Mar 22, 2018
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
SYSTEM AND METHOD FOR CRYSTALLINE SHEET GROWTH USING A COLD BLOCK A...
- Publication number 20180047864
- Publication date Feb 15, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT
- Publication number 20170051430
- Publication date Feb 23, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Dawei SUN
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus For Improving Temperature Uniformity Of A Workpiece
- Publication number 20160268150
- Publication date Sep 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Dawei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...
- Publication number 20150040818
- Publication date Feb 12, 2015
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS
- Publication number 20140209016
- Publication date Jul 31, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...
- Publication number 20130213295
- Publication date Aug 22, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Brian H. Mackintosh
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...
- Publication number 20130213296
- Publication date Aug 22, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS
- Publication number 20110271899
- Publication date Nov 10, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
REMOVING A SHEET FROM THE SURFACE OF A MELT USING ELASTICITY AND BU...
- Publication number 20110272115
- Publication date Nov 10, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH

Person

Patents Grantslast 30 patents

Chuck for processing semiconductor workpieces at high temperatures

Producing a ribbon or wafer with regions of low oxygen concentration

System and method for dissipating workpiece charge build up

Solid state heater and method of manufacture

Method and apparatus for calibration of substrate temperature using...

Hybrid control system for workpiece heating

Enhanced substrate temperature measurement apparatus, system and me...

Deflectable platens and associated methods

Deflectable platen and associated method

Carbon nanotube electrostatic chuck

Method for achieving sustained anisotropic crystal growth on the su...

Apparatus for forming crystalline sheet from a melt

Apparatus and method for crystalline sheet growth

Method for achieving sustained anisotropic crystal growth on the su...

System and method for crystalline sheet growth using a cold block a...

Sheet production apparatus for removing a crystalline sheet from th...

Apparatus for improving temperature uniformity of a workpiece

Removing a sheet from the surface of a melt using elasticity and bu...

Removing a sheet from the surface of a melt using gas jets

Patents Applicationslast 30 patents

MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY

SYSTEM AND METHOD FOR DISSIPATING WORKPIECE CHARGE BUILD UP

Model-Based Controlled Load Lock Pumping Scheme

Chuck For Processing Semiconductor Workpieces At High Temperatures

PRODUCING A RIBBON OR WAFER WITH REGIONS OF LOW OXYGEN CONCENTRATION

DEFLECTABLE PLATENS AND ASSOCIATED METHODS

CARBON NANOTUBE ELECTROSTATIC CHUCK

Solid State Heater And Method Of Manufacture

DEFLECTABLE PLATEN AND ASSOCIATED METHOD

DEFLECTABLE PLATENS AND ASSOCIATED METHODS

Hybrid Control System For Workpiece Heating

METHOD AND APPARATUS FOR CALIBRATION OF SUBSTRATE TEMPERATURE USING...

SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...

ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...

APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...

APPARATUS AND METHOD FOR CRYSTALLINE SHEET GROWTH

SYSTEM AND METHOD FOR CRYSTALLINE SHEET GROWTH USING A COLD BLOCK A...

APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT

Apparatus For Improving Temperature Uniformity Of A Workpiece

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...

REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...

METHOD FOR ACHIEVING SUSTAINED ANISOTROPIC CRYSTAL GROWTH ON THE SU...

REMOVING A SHEET FROM THE SURFACE OF A MELT USING GAS JETS

REMOVING A SHEET FROM THE SURFACE OF A MELT USING ELASTICITY AND BU...