De-Fang Huang

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,880,140
- Issue date Jan 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,520,237
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 11,003,089
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 10,663,868
- Issue date May 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for dynamic lithographic exposure
- Patent number 10,274,830
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for semiconductor wafer alignment
- Patent number 9,952,520
- Issue date Apr 24, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shing-Kuei Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for semiconductor wafer alignment
- Patent number 9,601,436
- Issue date Mar 21, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shing-Kuei Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for baking photoresist patterns
- Patent number 9,541,836
- Issue date Jan 10, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Min Lin
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
EPI wafer and method of making the same
- Patent number 7,456,079
- Issue date Nov 25, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsueh-Liang Chou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20230075146
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20210255549
- Publication date Aug 19, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20200241427
- Publication date Jul 30, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20190094706
- Publication date Mar 28, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE
- Publication number 20170212423
- Publication date Jul 27, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Jun-Yih Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR SEMICONDUCTOR WAFER ALIGNMENT
- Publication number 20170192367
- Publication date Jul 6, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shing-Kuei LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SEMICONDUCTOR WAFER ALIGNMENT
- Publication number 20150357287
- Publication date Dec 10, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Shing-Kuei LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR BAKING PHOTORESIST PATTERNS
- Publication number 20150227050
- Publication date Aug 13, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chin-Min LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPI wafer and method of making the same
- Publication number 20070048974
- Publication date Mar 1, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsueh-Liang Chou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

De-Fang Huang

Person

Patents Grantslast 30 patents

Method and apparatus for dynamic lithographic exposure

Method and apparatus for dynamic lithographic exposure

Method and apparatus for dynamic lithographic exposure

Method and apparatus for dynamic lithographic exposure

Method and apparatus for dynamic lithographic exposure

Method for semiconductor wafer alignment

Method for semiconductor wafer alignment

Method and apparatus for baking photoresist patterns

EPI wafer and method of making the same

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

METHOD AND APPARATUS FOR DYNAMIC LITHOGRAPHIC EXPOSURE

METHOD FOR SEMICONDUCTOR WAFER ALIGNMENT

METHOD FOR SEMICONDUCTOR WAFER ALIGNMENT

METHOD AND APPARATUS FOR BAKING PHOTORESIST PATTERNS

EPI wafer and method of making the same