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Dea Won Kim
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Asan, KR
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Patents Grants
last 30 patents
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Patent Grant
Method of and apparatus for controlling the chemical mechanical pol...
Patent number
6,827,629
Issue date
Dec 7, 2004
Samsung Electronics Co., Ltd.
Dea-Yun Kim
B24 - GRINDING POLISHING
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Patent Grant
Method for transferring a wafer after removing a washing solution
Patent number
6,090,220
Issue date
Jul 18, 2000
Samsung Electronics Co., Ltd.
Dea Won Kim
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Method of and apparatus for controlling the chemical mechanical pol...
Publication number
20040111175
Publication date
Jun 10, 2004
Dea-Yun Kim
B24 - GRINDING POLISHING