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Dean Berlin
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College Park, MD, US
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last 30 patents
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Patent Grant
Apparatus for improved azimuthal thermal uniformity of a substrate
Patent number
7,964,038
Issue date
Jun 21, 2011
Applied Materials, Inc.
Kailash Kiran Patalay
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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last 30 patents
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Patent Application
METHODS AND APPARATUS FOR IMPROVED AZIMUTHAL THERMAL UNIFORMITY OF...
Publication number
20100086784
Publication date
Apr 8, 2010
Applied Materials, Inc.
KAILASH KIRAN PATALAY
H01 - BASIC ELECTRIC ELEMENTS