Dean J. Larson

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cooled pin lifter paddle for semiconductor substrate processing app...
- Patent number 9,859,145
- Issue date Jan 2, 2018
- Lam Research Corporation
- Andreas Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber with features from side wall
- Patent number 9,484,243
- Issue date Nov 1, 2016
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for verifying gas flow rates from a gas supply system into...
- Patent number 9,234,775
- Issue date Jan 12, 2016
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of polishing a metal surface of a barrier door of a gate val...
- Patent number 9,151,408
- Issue date Oct 6, 2015
- Lam Research Corporation
- Dean J. Larson
- B24 - GRINDING POLISHING
Information Patent Grant
Film adhesive for semiconductor vacuum processing apparatus
- Patent number 9,028,646
- Issue date May 12, 2015
- Lam Research Corporation
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Grant
Uniform etch system
- Patent number 8,801,892
- Issue date Aug 12, 2014
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas switching section including valves having different flow coeffi...
- Patent number 8,772,171
- Issue date Jul 8, 2014
- Lam Research Corporation
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite showerhead electrode assembly for a plasma processing app...
- Patent number 8,701,268
- Issue date Apr 22, 2014
- Lam Research Corporation
- Dean Jay Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning aluminum plasma chamber parts
- Patent number 8,545,639
- Issue date Oct 1, 2013
- Lam Research Corporation
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Film adhesive for semiconductor vacuum processing apparatus
- Patent number 8,449,786
- Issue date May 28, 2013
- Lam Research Corporation
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Grant
Composite showerhead electrode assembly for a plasma processing app...
- Patent number 8,418,649
- Issue date Apr 16, 2013
- Lam Research Corporation
- Dean Jay Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas switching section including valves having different flow coeffi...
- Patent number 8,313,611
- Issue date Nov 20, 2012
- Lam Research Corporation
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas switching section including valves having different flow coeffi...
- Patent number 8,088,248
- Issue date Jan 3, 2012
- Lam Research Corporation
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz guard ring centering features
- Patent number 8,084,705
- Issue date Dec 27, 2011
- Lam Research Corporation
- Dean J. Larson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma processing chamber with guard ring for upper electrode assembly
- Patent number 7,939,778
- Issue date May 10, 2011
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz guard ring centering features
- Patent number 7,875,824
- Issue date Jan 25, 2011
- Lam Research Corporation
- Dean J. Larson
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Quartz guard ring
- Patent number 7,482,550
- Issue date Jan 27, 2009
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform etch system
- Patent number 7,371,332
- Issue date May 13, 2008
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution system with tuning gas
- Patent number 7,169,231
- Issue date Jan 30, 2007
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lift pin impact management
- Patent number 6,481,723
- Issue date Nov 19, 2002
- Lam Research Corporation
- Fangli J. Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer atmospheric transport module having a controlled mini-environ...
- Patent number 6,364,762
- Issue date Apr 2, 2002
- Lam Research Corporation
- Farro F. Kaveh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tolerance resistant and vacuum compliant door hinge with open-assis...
- Patent number 6,263,542
- Issue date Jul 24, 2001
- Lam Research Corporation
- Dean Jay Larson
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING CHAMBER WITH FEATURES FROM SIDE WALL
- Publication number 20150303085
- Publication date Oct 22, 2015
- LAM RESEARCH CORPORATION
- Dean J. LARSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLED PIN LIFTER PADDLE FOR SEMICONDUCTOR SUBSTRATE PROCESSING APP...
- Publication number 20150024594
- Publication date Jan 22, 2015
- Lam Research Corporation
- Andreas Fischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFI...
- Publication number 20140148015
- Publication date May 29, 2014
- LAM RESEARCH CORPORATION
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...
- Publication number 20140033828
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Dean J. Larson
- G01 - MEASURING TESTING
Information Patent Application
FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
- Publication number 20130292048
- Publication date Nov 7, 2013
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20130244441
- Publication date Sep 19, 2013
- LAM RESEARCH CORPORATION
- Dean Jay Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD OF POLISHING A METAL SURFACE OF A BARRIER DOOR OF A GATE VAL...
- Publication number 20130199705
- Publication date Aug 8, 2013
- LAM RESEARCH CORPORATION
- Dean J. Larson
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS
- Publication number 20130104930
- Publication date May 2, 2013
- LAM RESEARCH CORPORATION
- Hong Shih
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFI...
- Publication number 20120070997
- Publication date Mar 22, 2012
- LAM RESEARCH CORPORATION
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ GUARD RING CENTERING FEATURES
- Publication number 20110083318
- Publication date Apr 14, 2011
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS
- Publication number 20100304571
- Publication date Dec 2, 2010
- Dean J. Larson
- B32 - LAYERED PRODUCTS
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20090163034
- Publication date Jun 25, 2009
- LAM RESEARCH CORPORATION
- DEAN JAY LARSON
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PLASMA PROCESSING CHAMBER WITH GUARD RING FOR UPPER ELECTRODE ASSEMBLY
- Publication number 20090127234
- Publication date May 21, 2009
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM ETCH SYSTEM
- Publication number 20080210377
- Publication date Sep 4, 2008
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz guard ring centering features
- Publication number 20080099120
- Publication date May 1, 2008
- Lam Research Corporation, Fremont, California USA.
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz guard ring
- Publication number 20080099448
- Publication date May 1, 2008
- LAM RESEARCH CORPORATION
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas switching section including valves having different flow coeffi...
- Publication number 20070158025
- Publication date Jul 12, 2007
- Lam Research Corporation
- Dean J. Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for verifying gas flow rates from a gas supply system into...
- Publication number 20070021935
- Publication date Jan 25, 2007
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Application
Uniform etch system
- Publication number 20040112540
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- G05 - CONTROLLING REGULATING
Information Patent Application
Gas distribution system with tuning gas
- Publication number 20040112538
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniform etch system
- Publication number 20040112539
- Publication date Jun 17, 2004
- Lam Research Corporation
- Dean J. Larson
- H01 - BASIC ELECTRIC ELEMENTS

Dean J. Larson

Person

Patents Grantslast 30 patents

Cooled pin lifter paddle for semiconductor substrate processing app...

Processing chamber with features from side wall

Methods for verifying gas flow rates from a gas supply system into...

Method of polishing a metal surface of a barrier door of a gate val...

Film adhesive for semiconductor vacuum processing apparatus

Uniform etch system

Gas switching section including valves having different flow coeffi...

Composite showerhead electrode assembly for a plasma processing app...

Method of cleaning aluminum plasma chamber parts

Film adhesive for semiconductor vacuum processing apparatus

Composite showerhead electrode assembly for a plasma processing app...

Gas switching section including valves having different flow coeffi...

Gas switching section including valves having different flow coeffi...

Quartz guard ring centering features

Plasma processing chamber with guard ring for upper electrode assembly

Quartz guard ring centering features

Quartz guard ring

Uniform etch system

Gas distribution system with tuning gas

Lift pin impact management

Wafer atmospheric transport module having a controlled mini-environ...

Tolerance resistant and vacuum compliant door hinge with open-assis...

Patents Applicationslast 30 patents

PROCESSING CHAMBER WITH FEATURES FROM SIDE WALL

COOLED PIN LIFTER PADDLE FOR SEMICONDUCTOR SUBSTRATE PROCESSING APP...

GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFI...

METHODS FOR VERIFYING GAS FLOW RATES FROM A GAS SUPPLY SYSTEM INTO...

FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

METHOD OF POLISHING A METAL SURFACE OF A BARRIER DOOR OF A GATE VAL...

METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS

GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFI...

QUARTZ GUARD RING CENTERING FEATURES

FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

PLASMA PROCESSING CHAMBER WITH GUARD RING FOR UPPER ELECTRODE ASSEMBLY

UNIFORM ETCH SYSTEM

Quartz guard ring centering features

Quartz guard ring

Gas switching section including valves having different flow coeffi...

Methods for verifying gas flow rates from a gas supply system into...

Uniform etch system

Gas distribution system with tuning gas

Uniform etch system