Dean R. Denison

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process for depositing a SiOx film having reduced intrinsic stress...
- Patent number 6,326,064
- Issue date Dec 4, 2001
- Lam Research Corporation
- Dean R. Denison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing fluorine doped silicon dioxide films
- Patent number 6,042,901
- Issue date Mar 28, 2000
- Lam Research Corporation
- Dean R. Denison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of in-situ cleaning of a chuck within a plasma chamber
- Patent number 5,911,833
- Issue date Jun 15, 1999
- Lam Research Corporation
- Dean Denison
- B08 - CLEANING
Information Patent Grant
Method and apparatus for improving refractive index of dielectric f...
- Patent number 5,897,711
- Issue date Apr 27, 1999
- Lam Research Corporation
- Dean R. Denison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing nitrogen surface treated fluorine doped silico...
- Patent number 5,869,149
- Issue date Feb 9, 1999
- Lam Research Corporation
- Dean R. Denison
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chuck for substrate processing and method for depositing a film in...
- Patent number 5,841,623
- Issue date Nov 24, 1998
- Lam Research Corporation
- Dean R. Denison
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Process for depositing a SiO.sub.x film having reduced intrinsic st...
- Patent number 5,750,211
- Issue date May 12, 1998
- Lam Research Corporation
- Mark Weise
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for magnetron in-situ cleaning of plasma react...
- Patent number 5,503,676
- Issue date Apr 2, 1996
- Lam Research Corporation
- Paul K. Shufflebotham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction chamber design to minimize particle generation in chemical...
- Patent number 5,368,646
- Issue date Nov 29, 1994
- Lam Research Corporation
- Arthur K. Yasuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber design and method to minimize particle generation...
- Patent number 5,200,232
- Issue date Apr 6, 1993
- Lam Research Corporation
- James E. Tappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Dean R. Denison

Person

Patents Grantslast 30 patents

Process for depositing a SiOx film having reduced intrinsic stress...

Method for depositing fluorine doped silicon dioxide films

Method of in-situ cleaning of a chuck within a plasma chamber

Method and apparatus for improving refractive index of dielectric f...

Method for preparing nitrogen surface treated fluorine doped silico...

Chuck for substrate processing and method for depositing a film in...

Process for depositing a SiO.sub.x film having reduced intrinsic st...

Apparatus and method for magnetron in-situ cleaning of plasma react...

Reaction chamber design to minimize particle generation in chemical...

Reaction chamber design and method to minimize particle generation...