Deborah A. Leek

Follow

Person

Washougal, WA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of qualifying a process tool with wafer defect maps
- Patent number 7,079,966
- Issue date Jul 18, 2006
- LSI Logic Corporation
- John A. Knoch
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Defect monitoring system
- Publication number 20060069659
- Publication date Mar 30, 2006
- Michael S. Gatov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of qualifying a process tool with wafer defect maps
- Publication number 20050065739
- Publication date Mar 24, 2005
- John A. Knoch
- G01 - MEASURING TESTING