Debra L. Scherber

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Orangevale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing slurry for metal layers and films
- Patent number 5,858,813
- Issue date Jan 12, 1999
- Cabot Corporation
- Debra L. Scherber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing slurry for metal layers
- Patent number 5,527,423
- Issue date Jun 18, 1996
- Cabot Corporation
- Matthew Neville
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...