Deenesh PADHI

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Analyzing in-plane distortion
- Patent number 11,948,846
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Boron nitride for mask patterning
- Patent number 11,935,751
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Siyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low impedance current path for edge non-uniformity tuning
- Patent number 11,929,278
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mesa height modulation for thickness correction
- Patent number 11,869,795
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for pressure ramped plasma purge
- Patent number 11,817,313
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Profile shaping for control gate recesses
- Patent number 11,784,229
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply signal conditioning for an electrostatic chuck
- Patent number 11,776,835
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tensile nitride deposition systems and methods
- Patent number 11,710,631
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods of seasoning electrostatic chucks with dielectr...
- Patent number 11,646,216
- Issue date May 9, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing in-plane distortion
- Patent number 11,637,043
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi channel splitter spool
- Patent number 11,600,468
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 11,594,409
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-layer stacks for 3D NAND extendability
- Patent number 11,569,257
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for depositing high density and high tensile st...
- Patent number 11,538,677
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Chuanxi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a hydrophobic and icephobic coating
- Patent number 11,530,478
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Rajeev Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of silicon boron nitride films
- Patent number 11,515,145
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Chuanxi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate supports with improved high temperature chu...
- Patent number 11,501,993
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Initiation modulation for plasma deposition
- Patent number 11,430,654
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stack overlay improvement
- Patent number 11,339,475
- Issue date May 24, 2022
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-k dielectric with self-forming barrier layer
- Patent number 11,289,369
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On stack overlay improvement for 3D NAND
- Patent number 11,276,569
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Yongjing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone electrostatic chuck
- Patent number 11,270,903
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential deposition and high frequency plasma treatment of deposi...
- Patent number 11,217,443
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process development visualization tool
- Patent number 11,157,661
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Vinayak Veer Vats
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of forming film stacks with reduced defects
- Patent number 11,145,504
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Zhijun Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
- Patent number 11,136,665
- Issue date Oct 5, 2021
- Applied Materials, Inc.
- Dale Du Bois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to enable high temperature processing without chamber drifting
- Patent number 11,060,189
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SiBN film for conformal hermetic dielectric encapsulation without d...
- Patent number 11,011,371
- Issue date May 18, 2021
- Applied Materials, Inc.
- Milind Gadre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed plasma deposition etch step coverage improvement
- Patent number 10,950,430
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High deposition rate and high quality nitride
- Patent number 10,790,140
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Xinhai Han
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DOPED SILICON OXIDE FOR BOTTOM-UP DEPOSITION
- Publication number 20240420949
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Woongsik Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...
- Publication number 20240332000
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO IMPROVE QUALITY SILICON-CONTAINING MATERIALS
- Publication number 20240332006
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Tianyang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE
- Publication number 20240332009
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Qixin Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANALYZING IN-PLANE DISTORTION
- Publication number 20240243018
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR CLEANING USING PLASMA-FREE PRECURSORS
- Publication number 20240145230
- Publication date May 2, 2024
- Applied Materials, Inc.
- Abhishek Mandal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Deposition of Thin Films with Improved Stability
- Publication number 20240110284
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Lulu XIONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORINE-DOPED SILICON-CONTAINING MATERIALS
- Publication number 20240087882
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Siyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON MOLD FOR DRAM CAPACITOR
- Publication number 20240038833
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Fredrick Fishburn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20230411462
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20230274968
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYZING IN-PLANE DISTORTION
- Publication number 20230238289
- Publication date Jul 27, 2023
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20230094180
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Shaunak Mukherjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROPHOBIC AND ICEPHOBIC COATING
- Publication number 20230063929
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Rajeev BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION
- Publication number 20230011938
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Saketh Pemmasani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MESA HEIGHT MODULATION FOR THICKNESS CORRECTION
- Publication number 20230008922
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Memory Device With Reduced Resistivity
- Publication number 20220415651
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Qixin Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON NITRIDE FOR MASK PATTERNING
- Publication number 20220384189
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Siyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING
- Publication number 20220375776
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HELIUM-FREE SILICON FORMATION
- Publication number 20220336216
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Zeqiong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED SILICON NITRIDE FOR 3D NAND
- Publication number 20220216048
- Publication date Jul 7, 2022
- Applied Materials, Inc.
- Tianyang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON OXIDE GAP FILL USING CAPACITIVELY COUPLED PLASMAS
- Publication number 20220157602
- Publication date May 19, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANALYZING IN-PLANE DISTORTION
- Publication number 20220138396
- Publication date May 5, 2022
- Applied Materials, Inc.
- Wenjiao Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS
- Publication number 20220130661
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20220123114
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING DEFECTS IN A MULTI-LAYER PECVD TEOS OXIDE FILM
- Publication number 20220119952
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Rana Howlader
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRIC ARC MITIGATING FACEPLATE
- Publication number 20220122811
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Madhu Santosh Kumar Mutyala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20220122872
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK
- Publication number 20220102179
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Zheng John Ye
- H01 - BASIC ELECTRIC ELEMENTS

Deenesh PADHI

Person

Patents Grantslast 30 patents

Analyzing in-plane distortion

Boron nitride for mask patterning

Low impedance current path for edge non-uniformity tuning

Mesa height modulation for thickness correction

Methods for pressure ramped plasma purge

Profile shaping for control gate recesses

Power supply signal conditioning for an electrostatic chuck

Tensile nitride deposition systems and methods

Systems and methods of seasoning electrostatic chucks with dielectr...

Analyzing in-plane distortion

Multi channel splitter spool

Systems and methods for depositing low-k dielectric films

Multi-layer stacks for 3D NAND extendability

Systems and methods for depositing high density and high tensile st...

Method for forming a hydrophobic and icephobic coating

Deposition of silicon boron nitride films

Semiconductor substrate supports with improved high temperature chu...

Initiation modulation for plasma deposition

Film stack overlay improvement

Low-k dielectric with self-forming barrier layer

On stack overlay improvement for 3D NAND

Multi zone electrostatic chuck

Sequential deposition and high frequency plasma treatment of deposi...

Process development visualization tool

Method of forming film stacks with reduced defects

Shadow ring for modifying wafer edge and bevel deposition

Method to enable high temperature processing without chamber drifting

SiBN film for conformal hermetic dielectric encapsulation without d...

Pulsed plasma deposition etch step coverage improvement

High deposition rate and high quality nitride

Patents Applicationslast 30 patents

DOPED SILICON OXIDE FOR BOTTOM-UP DEPOSITION

DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...

METHODS TO IMPROVE QUALITY SILICON-CONTAINING MATERIALS

ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

ANALYZING IN-PLANE DISTORTION

SEMICONDUCTOR CLEANING USING PLASMA-FREE PRECURSORS

Selective Deposition of Thin Films with Improved Stability

FLUORINE-DOPED SILICON-CONTAINING MATERIALS

CARBON MOLD FOR DRAM CAPACITOR

PROFILE SHAPING FOR CONTROL GATE RECESSES

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

ANALYZING IN-PLANE DISTORTION

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

HYDROPHOBIC AND ICEPHOBIC COATING

SHAPED SHOWERHEAD FOR EDGE PLASMA MODULATION

MESA HEIGHT MODULATION FOR THICKNESS CORRECTION

Methods Of Forming Memory Device With Reduced Resistivity

BORON NITRIDE FOR MASK PATTERNING

LOW IMPEDANCE CURRENT PATH FOR EDGE NON-UNIFORMITY TUNING

HELIUM-FREE SILICON FORMATION

DOPED SILICON NITRIDE FOR 3D NAND

SILICON OXIDE GAP FILL USING CAPACITIVELY COUPLED PLASMAS

ANALYZING IN-PLANE DISTORTION

TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS

PROFILE SHAPING FOR CONTROL GATE RECESSES

METHOD OF REDUCING DEFECTS IN A MULTI-LAYER PECVD TEOS OXIDE FILM

ELECTRIC ARC MITIGATING FACEPLATE

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK