Deepak K. Gupta

Follow

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Glue layer for hydrofluorocarbon etch
- Patent number 7,902,073
- Issue date Mar 8, 2011
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GLUE LAYER FOR HYDROFLUOROCARBON ETCH
- Publication number 20080146032
- Publication date Jun 19, 2008
- Lam Research Corporation
- Ji Soo Kim
- H01 - BASIC ELECTRIC ELEMENTS