Membership
Tour
Register
Log in
Demetrios P. Papageorgiou
Follow
Person
Weston, MA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
CMOS-compatible bulk-micromachining process for single-crystal MEMS...
Patent number
7,749,789
Issue date
Jul 6, 2010
Solid-State Research, Inc.
Demetrios P Papageorgiou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CMOS-COMPATIBLE BULK-MICROMACHINING PROCESS FOR SINGLE-CRYSTAL MEMS...
Publication number
20090275162
Publication date
Nov 5, 2009
SOLID-STATE RESEARCH
Demetrios P. Papageorgiou
B81 - MICRO-STRUCTURAL TECHNOLOGY