Dengliang Yang

Person

Union City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for metastable activated radical selective stri...
- Patent number 11,694,911
- Issue date Jul 4, 2023
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
- Patent number 11,469,079
- Issue date Oct 11, 2022
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for selectively etching film
- Patent number 10,727,089
- Issue date Jul 28, 2020
- Lam Research Corporation
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrahigh selective polysilicon etch with high throughput
- Patent number 10,283,615
- Issue date May 7, 2019
- Novellus Systems, Inc.
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detecting oxygen in-situ in a substrate are...
- Patent number 10,267,728
- Issue date Apr 23, 2019
- Lam Research Corporation
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for ultrahigh selective nitride etch
- Patent number 10,192,751
- Issue date Jan 29, 2019
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for increasing electron density levels in a plasm...
- Patent number 10,147,588
- Issue date Dec 4, 2018
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for selectively etching tungsten in a downstrea...
- Patent number 9,837,286
- Issue date Dec 5, 2017
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-limited planarization of hardmask
- Patent number 9,640,409
- Issue date May 2, 2017
- Lam Research Corporation
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air gap spacer integration for improved fin device performance
- Patent number 9,515,156
- Issue date Dec 6, 2016
- Lam Research Corporation
- Paul Raymond Besser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-thin organic TFT chemical sensor, making thereof, and sensing...
- Patent number 8,384,409
- Issue date Feb 26, 2013
- The Regents of the University of California
- Andrew C. Kummel
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258129
- Publication date Aug 1, 2024
- Lam Reseach Corporation
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258130
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20240258131
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Dengliang YANG
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20230369076
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Dengliang Yang
- B08 - CLEANING
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20230084901
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Kwame EASON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT
- Publication number 20190221654
- Publication date Jul 18, 2019
- Novellus Systems, Inc.
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20180269070
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...
- Publication number 20180174870
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...
- Publication number 20180088031
- Publication date Mar 29, 2018
- LAM RESEARCH CORPORATION
- Dengliang Yang
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...
- Publication number 20170236694
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM
- Publication number 20170236731
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ULTRAHIGH SELECTIVE NITRIDE ETCH
- Publication number 20170110335
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVELY ETCHING TUNGSTEN IN A DOWNSTREA...
- Publication number 20170069511
- Publication date Mar 9, 2017
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR GAP SPACER INTEGRATION FOR IMPROVED FIN DEVICE PERFORMANCE
- Publication number 20160111515
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Paul Raymond Besser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT
- Publication number 20160064519
- Publication date Mar 3, 2016
- LAM RESEARCH CORPORATION
- Dengliang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA-THIN ORGANIC TFT CHEMICAL SENSOR, MAKING THEREOF, AND SENSING...
- Publication number 20100176837
- Publication date Jul 15, 2010
- The Regents of the University of California
- Andrew C. Kummel
- G01 - MEASURING TESTING

Dengliang Yang

Person

Patents Grantslast 30 patents

Systems and methods for metastable activated radical selective stri...

Ultrahigh selective nitride etch to form FinFET devices

Systems and methods for selectively etching film

Ultrahigh selective polysilicon etch with high throughput

Systems and methods for detecting oxygen in-situ in a substrate are...

Systems and methods for ultrahigh selective nitride etch

System and method for increasing electron density levels in a plasm...

Systems and methods for selectively etching tungsten in a downstrea...

Self-limited planarization of hardmask

Air gap spacer integration for improved fin device performance

Ultra-thin organic TFT chemical sensor, making thereof, and sensing...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES

ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT

ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES

SYSTEMS AND METHODS FOR METASTABLE ACTIVATED RADICAL SELECTIVE STRI...

SYSTEMS AND METHODS FOR DETECTING OXYGEN IN-SITU IN A SUBSTRATE ARE...

SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...

SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM

SYSTEMS AND METHODS FOR ULTRAHIGH SELECTIVE NITRIDE ETCH

SYSTEMS AND METHODS FOR SELECTIVELY ETCHING TUNGSTEN IN A DOWNSTREA...

AIR GAP SPACER INTEGRATION FOR IMPROVED FIN DEVICE PERFORMANCE

ULTRAHIGH SELECTIVE POLYSILICON ETCH WITH HIGH THROUGHPUT

ULTRA-THIN ORGANIC TFT CHEMICAL SENSOR, MAKING THEREOF, AND SENSING...